A SCANNING MEMS REFLECTOR SYSTEM

The actuation range obtained with a bending piezoelectric actuator in MEMS mirror system is mechanically amplified by fixing the moving end of the actuator (35) to a suspender (34) which suspends a reflector (31) from a frame (32). The fixing point (313) lies somewhere between the two ends of the su...

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Bibliographic Details
Main Author Torkkeli, Altti
Format Patent
LanguageEnglish
French
German
Published 28.02.2018
Subjects
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:The actuation range obtained with a bending piezoelectric actuator in MEMS mirror system is mechanically amplified by fixing the moving end of the actuator (35) to a suspender (34) which suspends a reflector (31) from a frame (32). The fixing point (313) lies somewhere between the two ends of the suspender. The actuator (35) and the suspender (34) together form an actuator unit with a greater actuation range than one actuator can obtain by itself. In one embodiment, the suspender is a rigid lever. In another embodiment, the suspender is another bending actuator so that an additional increase in the actuation range can be obtained from the actuating movement of the second actuator.
Bibliography:Application Number: EP20170184385