MICROSPECTROSCOPE

• Main Authors: AIZAWA, Kento, INOUE, Tsutomu, USUKI, Masateru
• Format: Patent
• Language: English; French; German
• Published: 31.01.2018
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Provided is a microspectroscope capable of performing a wide range of mapping measurements with high detection sensitivity, at high speed, and with high wavelength resolution. A Raman spectroscopy device that comprises: a means that linearly irradiates excitation light; a movable stage for samples; an objective lens that condenses Raman light from the linear irradiation area; an entrance slit provided at an image formation position for the Raman light; a spectrometer that disperses light that has passed through the entrance slit; a CCD detector that detects Raman spectral images; and a control device that synchronizes the movable stage and the CCD detector and controls mapping measurement. The control means is configured so as to: control the movable stage and move the linear irradiation area in a direction orthogonal to the longitudinal direction; and execute a CCD detector cycle during stage movement, so as to obtain one average spectrum for the movement range of the linear irradiation area in one optical detection cycle.