SPHERICAL ABERRATION CORRECTION DEVICE FOR CHARGED PARTICLE BEAM ELECTROMAGNETIC LENS

Technical Problem: An electromagnetic lens for charged particle beam exhibits positive spherical aberration. A complicated combination of electromagnetic lenses had been necessary for correcting this spherical aberration. Solution: One of a circular aperture or a ring-shaped aperture is provided on...

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Bibliographic Details
Main Authors KAWASAKI Tadahiro, IKUTA Takashi, TANJI Takayoshi
Format Patent
LanguageEnglish
French
German
Published 26.12.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:Technical Problem: An electromagnetic lens for charged particle beam exhibits positive spherical aberration. A complicated combination of electromagnetic lenses had been necessary for correcting this spherical aberration. Solution: One of a circular aperture or a ring-shaped aperture is provided on an incident plate arranged on an incident side of charged particle beam, another of the circular aperture or the ring-shaped aperture is provided on a plate arranged on an emission side thereof, and a voltage is applied between the incident plate and the emission plate. By so doing, an electric field generated in the ring-shaped aperture emanates, which resolves the positive spherical aberration. The spherical aberration can be corrected by an extremely simple and easily implemented structure.
Bibliography:Application Number: EP20160786168