METHOD AND APPARATUS FOR MAKING SILICA GLASS FROM POLYMERISABLE POLYALKYLSILOXANE WITH MEMBRANE FILTER AS CLEANING DEVICE
A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by ox...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
26.08.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by oxidation and/or by hydrolysis into SiO2 particles. The feedstock material vapor is passed through a membrane filter as a cleaning device to reduce the formation of gel, which is typically associated with the production of synthetic fused quartz. |
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Bibliography: | Application Number: EP20160704663 |