MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES

A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure incl...

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Bibliographic Details
Main Authors SABRY, Yasser, M, NAGI, Muhammed, SADEK, Mohamed, HASSAN, Khaled, MEDHAT, Mostafa, SAADANY, Bassam, A, MORTADA, Bassem, NADA, Yasseen
Format Patent
LanguageEnglish
French
German
Published 19.07.2023
Subjects
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Summary:A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.
Bibliography:Application Number: EP20160711920