LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING A LITHOGRAPHIC APPARATUS

A lithographic apparatus comprising: a channel (46) for the passage therethrough of a two phase flow, wherein the channel is formed within a block, the block being of a first material (100); a second material (160) between the first material and the channel, wherein the second material has a specifi...

Full description

Saved in:
Bibliographic Details
Main Authors CORTIE, Rogier, Hendrikus, Magdalena, JEUNINK, Andre, Bernardus, OVERKAMP, Jim, Vincent, VY, Van, Vuong, KOEVOETS, Adrianus, Hendrik, TROMP, Siegfried, Alexander, BERENDSEN, Christianus, Wilhelmus, Johannes, AUDENAERDT, Daniel, Elza, Roeland
Format Patent
LanguageEnglish
French
German
Published 24.04.2019
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:A lithographic apparatus comprising: a channel (46) for the passage therethrough of a two phase flow, wherein the channel is formed within a block, the block being of a first material (100); a second material (160) between the first material and the channel, wherein the second material has a specific heat capacity higher than that of the first material; and a third material (90) between the second material and the channel, wherein the third material has a thermal conductivity higher than that of the second material.
Bibliography:Application Number: EP20150721224