A DEVICE FOR MEASURING 3D SURFACE POTENTIAL DISTRIBUTION

• Main Authors: USHIWATA, Kodai, YOSHIMITSU, Tetsuo, HIDAKA, Kunihiko, IKEDA, Hisatoshi, FURUKAWA, Masaaki, TSUBOI, Yuichi, KUMADA, Akiko
• Format: Patent
• Language: English; French; German
• Published: 28.03.2018
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A three-dimensional surface potential distribution measurement apparatus (70) has: a laser light source (13); a Pockels crystal (11); a mirror; a light detector (16); a support structure (31) which supports the aforementioned elements while maintaining a relative positional relationship therebetween...