A DEVICE FOR MEASURING 3D SURFACE POTENTIAL DISTRIBUTION

A three-dimensional surface potential distribution measurement apparatus (70) has: a laser light source (13); a Pockels crystal (11); a mirror; a light detector (16); a support structure (31) which supports the aforementioned elements while maintaining a relative positional relationship therebetween...

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Bibliographic Details
Main Authors USHIWATA, Kodai, YOSHIMITSU, Tetsuo, HIDAKA, Kunihiko, IKEDA, Hisatoshi, FURUKAWA, Masaaki, TSUBOI, Yuichi, KUMADA, Akiko
Format Patent
LanguageEnglish
French
German
Published 28.03.2018
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A three-dimensional surface potential distribution measurement apparatus (70) has: a laser light source (13); a Pockels crystal (11); a mirror; a light detector (16); a support structure (31) which supports the aforementioned elements while maintaining a relative positional relationship therebetween; a movement driver which can move the support structure (31) three-dimensionally; a rotary driver (35) which supports the test object (8) and can rotate the test object (8) about an axis extending in a longitudinal direction of the test object (8) ; and a drive controller (37) which controls the movement driver and the rotary driver (35). The drive controller (37) coordinates a driving operation by the movement driver and by the rotary driver (35) while maintaining a gap between the second end face of the Pockels crystal (11) and a surface of the test object (8) at a predetermined value such that the second end face of the Pockels crystal (11) approaches all the surfaces of the electric field relaxation system (3) on the test object (8) .
Bibliography:Application Number: EP20140893842