A DEVICE FOR MEASURING 3D SURFACE POTENTIAL DISTRIBUTION

• Main Authors: USHIWATA, Kodai, YOSHIMITSU, Tetsuo, HIDAKA, Kunihiko, IKEDA, Hisatoshi, FURUKAWA, Masaaki, TSUBOI, Yuichi, KUMADA, Akiko
• Format: Patent
• Language: English; French; German
• Published: 28.03.2018
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A three-dimensional surface potential distribution measurement apparatus (70) has: a laser light source (13); a Pockels crystal (11); a mirror; a light detector (16); a support structure (31) which supports the aforementioned elements while maintaining a relative positional relationship therebetween; a movement driver which can move the support structure (31) three-dimensionally; a rotary driver (35) which supports the test object (8) and can rotate the test object (8) about an axis extending in a longitudinal direction of the test object (8) ; and a drive controller (37) which controls the movement driver and the rotary driver (35). The drive controller (37) coordinates a driving operation by the movement driver and by the rotary driver (35) while maintaining a gap between the second end face of the Pockels crystal (11) and a surface of the test object (8) at a predetermined value such that the second end face of the Pockels crystal (11) approaches all the surfaces of the electric field relaxation system (3) on the test object (8) .