DUAL SIGNAL COAXIAL CAVITY RESONATOR PLASMA GENERATION
A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a cente...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
15.02.2017
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Subjects | |
Online Access | Get full text |
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Summary: | A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a center conductor coupled to the radio frequency power source, and also includes a virtual short circuit. The direct current power source is connected to the center conductor at the virtual short circuit, and provides a voltage supply of direct current power having a second ratio of power over voltage that is less than the first ratio. |
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Bibliography: | Application Number: EP20150777252 |