DUAL SIGNAL COAXIAL CAVITY RESONATOR PLASMA GENERATION

A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a cente...

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Bibliographic Details
Main Authors SMITH, James E, LOWERY, Andrew D, SPENCER, Michael J
Format Patent
LanguageEnglish
French
German
Published 15.02.2017
Subjects
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Summary:A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a center conductor coupled to the radio frequency power source, and also includes a virtual short circuit. The direct current power source is connected to the center conductor at the virtual short circuit, and provides a voltage supply of direct current power having a second ratio of power over voltage that is less than the first ratio.
Bibliography:Application Number: EP20150777252