SPLIT-GATE POWER SEMICONDUCTOR FIELD-EFFECT TRANSISTOR

The present invention generally relates to a structure and manufacturing of a power field effect transistor (FET). The present invention provides a planar power metal oxide semiconductor field effect transistor (MOSFET) structure and an insulated gate bipolar transistor (IGBT) structure comprising a...

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Bibliographic Details
Main Authors SIN, Johnny Kin On, NG, Chun Wai, LIANG, Jiajin
Format Patent
LanguageEnglish
French
German
Published 23.09.2020
Subjects
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Summary:The present invention generally relates to a structure and manufacturing of a power field effect transistor (FET). The present invention provides a planar power metal oxide semiconductor field effect transistor (MOSFET) structure and an insulated gate bipolar transistor (IGBT) structure comprising a split gate and a semi-insulating field plate. The present invention also provides manufacturing methods of the structures.
Bibliography:Application Number: EP20140875355