SPLIT-GATE POWER SEMICONDUCTOR FIELD-EFFECT TRANSISTOR
The present invention generally relates to a structure and manufacturing of a power field effect transistor (FET). The present invention provides a planar power metal oxide semiconductor field effect transistor (MOSFET) structure and an insulated gate bipolar transistor (IGBT) structure comprising a...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
23.09.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention generally relates to a structure and manufacturing of a power field effect transistor (FET). The present invention provides a planar power metal oxide semiconductor field effect transistor (MOSFET) structure and an insulated gate bipolar transistor (IGBT) structure comprising a split gate and a semi-insulating field plate. The present invention also provides manufacturing methods of the structures. |
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Bibliography: | Application Number: EP20140875355 |