DETECTION APPARATUS FOR DETECTING PARTICLES ON A SURFACE

The invention relates to a detection apparatus (1) for detecting particles on or close to a particles detection surface (5) in a first optical detection mode and in a second optical detection mode, wherein a component of a light detection system (8) and/or a component of an optical system (9) of the...

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Bibliographic Details
Main Authors NEIJZEN, JACOBUS HERMANUS MARIA, SCHLEIPEN, JOHANNES JOSEPH HUBERTINA BARBARA
Format Patent
LanguageEnglish
French
German
Published 02.11.2016
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Summary:The invention relates to a detection apparatus (1) for detecting particles on or close to a particles detection surface (5) in a first optical detection mode and in a second optical detection mode, wherein a component of a light detection system (8) and/or a component of an optical system (9) of the detection apparatus is arranged to be used in the first detection mode and in the second detection mode. Since a component of the light detection system and/or a component of the optical system is arranged to be used in the first detection mode and in the second detection mode, this component does not need to be provided twice, i.e. for being used in the first detection mode and for being used in the second detection mode. This can lead to a reduced number of components and can make the detection apparatus technically less complex.
Bibliography:Application Number: EP20140809407