Vacuum pump with at least one pump stage
PROBLEM TO BE SOLVED: To provide a method capable of prolonging a service life of an abradable seal in a vacuum pump, and detecting abrasion of the seal in the vacuum pump early.SOLUTION: A vacuum pump 101 has at least one pump stage, a motor and a motor control part. In the vacuum pump that is a dr...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
18.11.2020
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a method capable of prolonging a service life of an abradable seal in a vacuum pump, and detecting abrasion of the seal in the vacuum pump early.SOLUTION: A vacuum pump 101 has at least one pump stage, a motor and a motor control part. In the vacuum pump that is a dry operation type vacuum pump having an abradable seal 148, at least one pressure sensor 51 is provided ahead of a first pump stage and/or in at least one compression chamber in the vacuum pump. The pressure sensor 51 is connected to an evaluation unit 53.SELECTED DRAWING: Figure 3 |
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Bibliography: | Application Number: EP20150158724 |