WET METHOD FOR THE PRODUCTION OF THIN FILMS

A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated in order to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is...

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Main Authors HEINRICHS, Benoît, ESKENAZI, David, PIRARD, Jean-Paul, PAEZ, Carlos, CALBERG, Cédric, LIQUET, Dimitri, ALIÉ, Christelle
Format Patent
LanguageEnglish
French
German
Published 06.03.2019
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Summary:A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated in order to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is selected from among di- or tri-aliphatic carboxylic acids, or salts or mixtures thereof. The polar organic solvent has a boiling temperature at atmospheric pressure of less than 150° C.
Bibliography:Application Number: EP20140792510