WET METHOD FOR THE PRODUCTION OF THIN FILMS
A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated in order to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English French German |
Published |
06.03.2019
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Subjects | |
Online Access | Get full text |
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Summary: | A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated in order to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is selected from among di- or tri-aliphatic carboxylic acids, or salts or mixtures thereof. The polar organic solvent has a boiling temperature at atmospheric pressure of less than 150° C. |
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Bibliography: | Application Number: EP20140792510 |