BIPOLAR NON-PUNCH-THROUGH POWER SEMICONDUCTOR DEVICE
The wafer comprises an inner region wand an outer region surrounding the inner region. The drift layer has a thickness in the inner region greater or equal than a thickness in the outer region. A thickness of the first layer increases in a transition region between the inner region and the outer reg...
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Main Authors | , , |
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Format | Patent |
Language | English French German |
Published |
04.10.2017
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Subjects | |
Online Access | Get full text |
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Summary: | The wafer comprises an inner region wand an outer region surrounding the inner region. The drift layer has a thickness in the inner region greater or equal than a thickness in the outer region. A thickness of the first layer increases in a transition region between the inner region and the outer region from a thickness in the inner region to a maximum thickness in the outer region. The thickness of the first layer increases linearly over the transition region with a width of the transition region greater than 5 times a thickness of the first section of the first layer. |
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Bibliography: | Application Number: EP20140747388 |