POLYCRYSTALLINE SILICON FRAGMENTS AND PROCESS FOR COMMINUTING POLYCRYSTALLINE SILICON RODS
Comminuted polysilicon with reduced contamination is prepared using multi-step comminution employing comminution with comminution tools of differing tungsten carbide content and/or grain size.
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
29.06.2016
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Subjects | |
Online Access | Get full text |
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