POLYCRYSTALLINE SILICON FRAGMENTS AND PROCESS FOR COMMINUTING POLYCRYSTALLINE SILICON RODS
Comminuted polysilicon with reduced contamination is prepared using multi-step comminution employing comminution with comminution tools of differing tungsten carbide content and/or grain size.
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English French German |
Published |
29.06.2016
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Comminuted polysilicon with reduced contamination is prepared using multi-step comminution employing comminution with comminution tools of differing tungsten carbide content and/or grain size. |
---|---|
Bibliography: | Application Number: EP20140752592 |