METHOD FOR OPERATING A FLUIDIZED BED REACTOR

Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.

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Bibliographic Details
Main Author WECKESSER, Dirk
Format Patent
LanguageEnglish
French
German
Published 20.09.2017
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Abstract Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.
AbstractList Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.
Author WECKESSER, Dirk
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DocumentTitleAlternate VERFAHREN ZUM BETREIBEN EINES WIRBELSCHICHTREAKTORS
PROCÉDÉ POUR FAIRE FONCTIONNER UN RÉACTEUR À LIT FLUIDISÉ
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Snippet Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with...
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SubjectTerms CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
Title METHOD FOR OPERATING A FLUIDIZED BED REACTOR
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