METHOD FOR OPERATING A FLUIDIZED BED REACTOR
Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.
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Format | Patent |
Language | English French German |
Published |
20.09.2017
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Online Access | Get full text |
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Abstract | Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature. |
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AbstractList | Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature. |
Author | WECKESSER, Dirk |
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DocumentTitleAlternate | VERFAHREN ZUM BETREIBEN EINES WIRBELSCHICHTREAKTORS PROCÉDÉ POUR FAIRE FONCTIONNER UN RÉACTEUR À LIT FLUIDISÉ |
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RelatedCompanies | Wacker Chemie AG |
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SubjectTerms | CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS |
Title | METHOD FOR OPERATING A FLUIDIZED BED REACTOR |
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