METHOD FOR OPERATING A FLUIDIZED BED REACTOR

Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.

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Bibliographic Details
Main Author WECKESSER, Dirk
Format Patent
LanguageEnglish
French
German
Published 20.09.2017
Subjects
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Summary:Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.
Bibliography:Application Number: EP20140730539