METHOD FOR OPERATING A FLUIDIZED BED REACTOR
Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature.
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Main Author | |
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Format | Patent |
Language | English French German |
Published |
20.09.2017
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Subjects | |
Online Access | Get full text |
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Summary: | Yield of products of increased purity from a fluidized bed reactor where silicon is produced or consumed is enhanced by purging with inert gas, purging with hydrogen gas, and purging with a chlorosilane-containing gas. The purging with hydrogen is conducted at an elevated temperature. |
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Bibliography: | Application Number: EP20140730539 |