CARRIER FOR SUBSTRATES
A carrier for supporting a substrate in a substrate processing chamber for vacuum processing is described. The carrier includes a substrate fixation assembly, wherein the substrate fixation assembly includes one or more fixation units; a first fixation dement having a first surface configured for co...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
20.01.2016
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Subjects | |
Online Access | Get full text |
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Summary: | A carrier for supporting a substrate in a substrate processing chamber for vacuum processing is described. The carrier includes a substrate fixation assembly, wherein the substrate fixation assembly includes one or more fixation units; a first fixation dement having a first surface configured for contacting a first substrate surface of the substrate; a second fixation element having a second surface configured for contacting a second substrate surface of the substrate; and a force dement for providing a fixation force for the substrate with at least one of the first and the second fixation element. |
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Bibliography: | Application Number: EP20130711866 |