MANUFACTURING LINE FOR SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

A manufacturing line (1) for a semiconductor device according to the invention is a manufacturing line for manufacturing a semiconductor device by circulating a workpiece (25) along a conveyance route (10) on which a plurality of treatment devices (20a to 20m) are arranged. The conveyance route (10)...

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Bibliographic Details
Main Author SUGIZAKI, DAISUKE
Format Patent
LanguageEnglish
French
German
Published 23.12.2015
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:A manufacturing line (1) for a semiconductor device according to the invention is a manufacturing line for manufacturing a semiconductor device by circulating a workpiece (25) along a conveyance route (10) on which a plurality of treatment devices (20a to 20m) are arranged. The conveyance route (10) includes a first route (11) on which the treatment devices with a large number of times of treatment are arranged, and a second route (12) on which the treatment devices with a small number of times of treatment are arranged. Besides, the conveyance route (10) makes a changeover between the conveyance of the workpiece (25) that has moved along the first route (11) to the first route (11) in a continuous manner, and the conveyance of the workpiece (25) that has moved along the first route (11) to the second route (12).
Bibliography:Application Number: EP20150172053