MANUFACTURING METHOD OF A FILM-BONDED STRUCTURE

A method of the present invention is a method for producing a film laminated structure, including the steps of: (a) preparing a ceramic substrate; (b) charging a mold with a slurry that contains a raw material powder, a gelling agent containing at least two polymerizable organic compounds, and an or...

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Bibliographic Details
Main Authors YOSHIOKA, Kunihiko, MORIYAMA, Satoko, SAKAKIBARA, Hironori, MURAKAMI, Mika
Format Patent
LanguageEnglish
French
German
Published 10.10.2018
Subjects
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Summary:A method of the present invention is a method for producing a film laminated structure, including the steps of: (a) preparing a ceramic substrate; (b) charging a mold with a slurry that contains a raw material powder, a gelling agent containing at least two polymerizable organic compounds, and an organic solvent serving as a dispersion medium, and molding and hardening the slurry through a polymerization reaction of the gelling agent to form a green body having a recessed portion or through-hole; (c) inserting the ceramic substrate into the recessed portion or through-hole of the green body and then drying the ceramic substrate and the green body to form a green structure; and (d) firing the green structure to form a film laminated structure, the film laminated structure including a film formed from the green body by firing, wherein in the step (c), before drying, a clearance x [µm] between the recessed portion or through-hole of the green body and the ceramic substrate inserted into the recessed portion or through-hole of the green body and a volume percentage y [vol%] of the dispersion medium in the slurry satisfy the following formulae: 0 ‰¤ x ‰¤ 250, y ‰¥ 0.067x + 30, y ‰¤ 0.1x + 60, and y ‰¤ 70.
Bibliography:Application Number: EP20150161003