DRIVE SYSTEM AND DRIVE METHOD, AND EXPOSURE DEVICE AND EXPOSURE METHOD

• Main Authors: SAKATA, Koichi, ASAUMI, Hiroyoshi
• Format: Patent
• Language: English; French; German
• Published: 28.11.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; HOLOGRAPHY; MATERIALS THEREFOR; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES

A synthetic controlled variable (X mix =F 1 (X c )+F 2 (X 2 , X 1 )) is obtained by obtaining a synthetic quantity (X c =±X 2 +²X 1 ) using measurement results (X 2 , X 1 ) of a first and a second measuring instruments and corresponding gains (or transfer function) (±, ²) and synthesizing the synthetic quantity (X c ) and one of the measurement results (X 2 , X 1 ) of the first and the second measuring instruments, respectively, via a high pass filter (F 1 ) and a low pass filter (F 2 ). A feedback control system is structured that obtains a control input (U) using a synthetic controlled variable (X mix ) and a desired value (R), and gives a plant the control input (U). This makes adding of a high pass filter for removing offset of installation position of the first and the second measuring instruments no longer necessary, and allows a driving system which controls robust driving in a high bandwidth of a plate stage (PST) regardless of bandwidth in which resonance appears to be designed.