PROCESS BOX, ASSEMBLY AND METHOD FOR PROCESSING COATED SUBSTRATES

• Main Authors: PALM, Jörg, JOST, Stefan, FÜRFANGER, Martin
• Format: Patent
• Language: English; French; German
• Published: 13.01.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention relates to a process box for processing a coated substrate, with the following features: a gas-tightly sealable housing, which forms a hollow space; the housing comprises at least one housing section, which is implemented such that the substrate is heat treatable by electromagnetic thermal radiation incident on the housing section; the housing has at least one housing section coupleable to a cooling device for its cooling and at least one non-coolable housing section; the hollow space is divided by at least one separating wall into a process space for accommodating the substrate and an intermediate space, wherein the separating wall has one or a plurality of openings and is arranged between the substrate and the temperature-controlable housing section; the housing is provided with at least one sealable gas passage that opens into the hollow space, for evacuating and introducing process gas into the hollow space. The invention further relates to assemblies and a method for processing a coated substrate, in which method at least one housing section of the process box is cooled during and/or after the heat treatment and diffusion to the temperature-controlled housing section of a gaseous substance generated during the heat treatment is inhibited by a separating wall provided with one or a plurality of openings, which is arranged between the coated substrate and the temperature-controlled housing section.