MEMS-Sensor

• Main Authors: BOILLOT, FRANÇOIS XAVIER, LAOUBI, RÉMI
• Format: Patent
• Language: English; French; German
• Published: 03.12.2014
• Subjects: GYROSCOPIC INSTRUMENTS; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; NAVIGATION; PERFORMING OPERATIONS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING; TRANSPORTING

A sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprises a substrate (13) defining a substrate plane and at least one sensing plate (11, 12) suspended above the substrate (13) for performing a movement having at least a first component in a sensing direction. The sensing direction is orthogonal to the substrate plane. There is at least one detection arm (14.1, 14.2) that is suspended above the substrate (13) for performing a rotational movement about a rotation axis parallel to the substrate plane. An out-of-plane coupling structure (17.1, 17.4) is used to couple the first component of the movement of said sensing plate (11, 12) to said detection arm (14.1, 14.2) for generating the rotational movement of the detection arm (14.1, 14.2). A rotation detection structure cooperates with the detection arm (14.1, 14.2) for detecting the rotational movement of the detection arm (14.1, 14.2) with respect to the substrate plane. A pivot element (17.2, 17.3) is arranged at a distance from the out-of-plane coupling structure (17.1, 17.4), said pivot element (17.2, 17.3) coupling the sensing plate to a geometric reference plane (19), which is at a fixed distance above the substrate plane, so that the sensing plate (11, 12) performs a tilting out-of-plane movement.