ACCELERATION SENSOR

The present invention provides an acceleration sensor in which rigidity of its movable electrode can be ensured despite a large number of through-holes formed in the movable electrode. The acceleration sensor has an SOI substrate (2) in which a silicon oxide layer (4) is formed on a silicon support...

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Bibliographic Details
Main Authors YAO, HIRONOBU, KISHIRO, MASAMI, SAKAUE, SATORU, SUZUKI, TAKESHI
Format Patent
LanguageEnglish
French
German
Published 11.05.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:The present invention provides an acceleration sensor in which rigidity of its movable electrode can be ensured despite a large number of through-holes formed in the movable electrode. The acceleration sensor has an SOI substrate (2) in which a silicon oxide layer (4) is formed on a silicon support layer (3) and an active silicon layer (5) is formed on the silicon oxide layer, wherein the active silicon layer of the SOI substrate has a movable electrode (11) supported by elastic beams and configured with a weight, and also has fixed electrodes (13a), (13xb), (14ya), (14yb) disposed in a fixed manner around the movable electrode to face the movable electrode, and wherein through-holes (16) penetrating in a Z-axis direction are formed over the entire surface on the inner side of an outer circumference to which the elastic beams (12) of the movable electrode are connected.
Bibliography:Application Number: EP20120849932