CONDUCTIVE COMPOSITIONS CONTAINING Li2RuO3 AND ION-EXCHANGED Li2RuO3 AND THEIR USE IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES

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Bibliographic Details
Main Authors VERNOOY, Paul Douglas, OZAWA, Kazutaka, KIKUCHI, Chieko
Format Patent
LanguageEnglish
French
German
Published 28.06.2017
Subjects
BASIC ELECTRIC ELEMENTS
CABLES
CONDUCTORS
ELECTRICITY
INSULATORS
SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES
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Bibliography:Application Number: EP20120750673