METHODS AND APPARATI FOR HANDLING, HEATING AND COOLING A SUBSTRATE UPON WHICH A PATTERN IS MADE BY A TOOL IN HEAT FLOWABLE MATERIAL COATING, INCLUDING SUBSTRATE TRANSPORT, TOOL LAYDOWN, TOOL TENSIONING, AND TOOL RETRACTION

A workpiece is transported using a porous belt, which belt delivers a workpiece to a chuck, upon which the workpiece is held by vacuum. The belt can be porous PTFE. A flexible stamp is preheated, before it is applied to a workpiece, by drawing the stamp toward a heated plate, for instance by vacuum.

Saved in:
Bibliographic Details
Main Authors HARRIS, DAMIEN, W, INIRIO, HECTOR, A, POLITO, BENJAMIN, F, SACHS, EMANUEL, M, KANE, PETER, E, GATES, HOLLY, G
Format Patent
LanguageEnglish
French
German
Published 29.04.2015
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:A workpiece is transported using a porous belt, which belt delivers a workpiece to a chuck, upon which the workpiece is held by vacuum. The belt can be porous PTFE. A flexible stamp is preheated, before it is applied to a workpiece, by drawing the stamp toward a heated plate, for instance by vacuum.
Bibliography:Application Number: EP20120833284