ENCAPSULATION OF ELECTRODES IN SOLID MEDIA FOR USE IN CONJUNCTION WITH HIGH VOLTAGE ISOLATION PROVIDED BY FLUID
An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a s...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French German |
Published |
25.07.2018
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Subjects | |
Online Access | Get full text |
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Abstract | An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid. |
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AbstractList | An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid. |
Author | GRAUPERA, Anthony PARKER, N. William KELLOGG, Sean WELLS, Andrew B MCGINN, James B UTLAUT, Mark W |
Author_xml | – fullname: PARKER, N. William – fullname: GRAUPERA, Anthony – fullname: WELLS, Andrew B – fullname: MCGINN, James B – fullname: UTLAUT, Mark W – fullname: KELLOGG, Sean |
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DocumentTitleAlternate | VERKAPSELUNG VON ELEKTRODEN IN FESTEN MEDIEN ZUR VERWENDUNG IN VERBINDUNG MIT EINER HOCHSPANNUNGSISOLIERUNG DURCH EINE FLÜSSIGKEIT ENCAPSULATION D'ÉLECTRODES DANS DES MILIEUX SOLIDES À UTILISER EN ASSOCIATION AVEC L'ISOLATION HAUTE TENSION PAR FLUIDE |
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Notes | Application Number: EP20120803226 |
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Snippet | An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS |
Title | ENCAPSULATION OF ELECTRODES IN SOLID MEDIA FOR USE IN CONJUNCTION WITH HIGH VOLTAGE ISOLATION PROVIDED BY FLUID |
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