ULTRAVIOLET LIGHT GENERATING TARGET, ELECTRON-BEAM-EXCITED ULTRAVIOLET LIGHT SOURCE, AND METHOD FOR PRODUCING ULTRAVIOLET LIGHT GENERATING TARGET

An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz, or rock crystal; and a light-emitting layer 22 that is provided on the substrate 21 and that generates ultraviolet light upon receiving an electron beam. The light-emitting layer 22 includes powdered or granu...

Full description

Saved in:
Bibliographic Details
Main Authors FUKUYO, Fumitsugu, HATTORI, Takeaki, HONDA, Yoshinori, SUZUKI, Takashi, KASAMATSU, Yuji, KAWAI, Koji, CHU, Shucheng, TAKETOMI, Hiroyuki
Format Patent
LanguageEnglish
French
German
Published 19.02.2020
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz, or rock crystal; and a light-emitting layer 22 that is provided on the substrate 21 and that generates ultraviolet light upon receiving an electron beam. The light-emitting layer 22 includes powdered or granular Pr:LuAG crystals. By using such a light-emitting layer 22 as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
Bibliography:Application Number: EP20120777284