A METHOD AND APPARATUS FOR PROVIDING IMAGE DATA FOR CONSTRUCTING AN IMAGE OF A REGION OF A TARGET OBJECT
Embodiments of the present invention provide a method (200) of providing image data for constructing an image of a region of a target object, comprising detecting, by at least one detector (40), at least a portion of radiation scattered by a target object (30) with the incident radiation (10) or an...
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Main Authors | , |
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Format | Patent |
Language | English French German |
Published |
05.03.2014
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Subjects | |
Online Access | Get full text |
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Summary: | Embodiments of the present invention provide a method (200) of providing image data for constructing an image of a region of a target object, comprising detecting, by at least one detector (40), at least a portion of radiation scattered by a target object (30) with the incident radiation (10) or an aperture at a predetermined probe position, determining an offset vector (203) for reducing an error associated with the probe position (201), estimating a wavefront (210) based on a probe function having the offset vector applied to the probe position, and providing image data responsive to the detected radiation. |
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Bibliography: | Application Number: EP20120717463 |