CHARGED PARTICLE BEAM MICROSCOPE WITH DIFFRACTION ABERRATION CORRECTOR APPLIED THERETO

• Main Authors: SUZUKI, NAOMASA, FUKUDA, MUNEYUKI, OSE, YOICHI, ITO, HIROYUKI, SUZUKI, HIROSHI, SATO, MITSUGU
• Format: Patent
• Language: English; French; German
• Published: 18.11.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

Based on the operation principle of diffraction aberration correction for controlling the phase of the electron beam using the Aharonov-Bohm effect, a diffraction aberration corrector is formed by the structure of a corrector formed by the multipole of the solenoid coil ring and a function of adjusting the degree of orthogonality or axial shift of the vector potential with respect to the beam axis. In order to cause a phase difference, the diffraction aberration corrector that induces a vector potential, which is perpendicular to the beam axis and has a symmetrical distribution within the orthogonal plane with respect to the beam axis, is provided near the objective aperture and the objective lens. A diffracted wave traveling in a state of being inclined from the beam axis passes through the ring of the magnetic flux. Therefore, since the phase difference within the beam diameter is increased by the Aharonov-Bohm effect due to the vector potential, it is possible to suppress the intensity of the electron beam on the sample.