SEMICONDUCTOR JUNCTION STRUCTURE AND METHOD FOR MANUFACTURING SEMICONDUCTOR JUNCTION STRUCTURE

Obtaining a semiconductor bonding structure body that has a superior stress alleviation property, and has a heat resistance property at the same time. A bonding structure body in which a semiconductor element (102) and an electrode (103) are bonded via a solder material, wherein a part (212) that al...

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Main Authors SAKATANI, Shigeaki, NAKAMURA, Taichi, FURUSAWA, Akio, ISHIMARU, Yukihiro, KITAURA, Hidetoshi
Format Patent
LanguageEnglish
French
German
Published 07.02.2018
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Summary:Obtaining a semiconductor bonding structure body that has a superior stress alleviation property, and has a heat resistance property at the same time. A bonding structure body in which a semiconductor element (102) and an electrode (103) are bonded via a solder material, wherein a part (212) that allows bonding has a first intermetallic compound layer (207') that has been formed on the electrode side, a second intermetallic compound layer (208') that has been formed on the semiconductor element side, and a third layer (300) that is constituted by a phase (210) containing Sn and a sticks-like intermetallic compound part (209'), which is sandwiched between the two layers of the first intermetallic compound layer (207') and the second intermetallic compound layer (208'), and the sticks-like intermetallic compound part (209') is interlayer-bonded to both of the first intermetallic compound layer (207') and the second intermetallic compound layer (208').
Bibliography:Application Number: EP20110834024