PRESSURE SENSOR HAVING A PIEZORESISTIVE SENSOR CHIP ELEMENT

• Main Authors: SONDEREGGER, CHRISTOF, ALBICKER, ULRICH, VON BERG, JOCHEN, TANNER, RENÉ, SCHNELLINGER, JEFFREY, M, MEISTER, PETER
• Format: Patent
• Language: English; French; German
• Published: 14.01.2015
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A piezoresistive sensor chip element of a pressure sensor has lower face with an outer edge, an adhesion area and a non-adhesion area. The chip has a closed chip cavity for measuring the pressure of a medium flowing around the chip. The upper face of a substrate is fastened only at the adhesion area of the chip. The non-adhesion area extends at least over a circular area arranged centrally on the lower face and covers a third of the lower face's total area and extends over at least one connection area from the circular area to the edge of the lower face. The pressure in the pressure medium can spread through the connection area into a space under the non-adhesion area on the element lower face. The substrate has a recess located centrally under the sensor chip element.