DEVICE AND METHOD FOR HEAT-TREATING A PLURALITY OF MULTI-LAYER BODIES

A device for continuous heat-treating of at least two multilayer bodies on at least two process levels disposed one beneath another in at least one heating chamber and at least one cooling chamber, which are arranged one after another is described. The heating chamber of the device has a first proce...

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Bibliographic Details
Main Authors JOST, Stefan, FÜRFANGER, Martin
Format Patent
LanguageEnglish
French
German
Published 15.07.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A device for continuous heat-treating of at least two multilayer bodies on at least two process levels disposed one beneath another in at least one heating chamber and at least one cooling chamber, which are arranged one after another is described. The heating chamber of the device has a first process level and a second process level. The cooling chamber of the device has a cooling device, the first process level and the second process level.
Bibliography:Application Number: EP20110767388