Device for positioning at least two objects, assemblies in particular multi-layer body assemblies, assembly for processing, in particular selenization, of objects, method for positioning at least two objects

• Main Authors: JOST, Stefan, PALM, Jörg, FÜRFANGER, Martin
• Format: Patent
• Language: English; French; German
• Published: 04.12.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The device (30e) has a spacer element (70e) for accommodating multi-layer bodies i.e. lower- and/or upper substrates (40, 50). The device is formed for accommodating the bodies such that a processing chamber (11) is formed between surfaces of the bodies to be processed for processing i.e. selenization, of the bodies as a multi-layer body arrangement (28d) in a processing system. Another spacer element accommodates the former spacer element such that the multi-layer body arrangement is formed. The latter spacer element is partially arranged below the lower multi-layer body. Independent claims are also included for the following: (1) a multi-layer body arrangement comprising a device for positioning two objects (2) a system for processing two objects (3) a method for positioning two objects.