High-voltage supply unit for a particle beam device

The invention relates to a high-voltage supply unit (100) for a particle beam device (11, 12) and to a particle beam device (11, 12) comprising a high-voltage supply unit (100) of this type. The high-voltage supply unit (100) has at least one high-voltage cable (101) for feeding a high voltage, and...

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Bibliographic Details
Main Authors HUGELMANN, MARTIN, FOBER, JOERG
Format Patent
LanguageEnglish
French
German
Published 19.12.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:The invention relates to a high-voltage supply unit (100) for a particle beam device (11, 12) and to a particle beam device (11, 12) comprising a high-voltage supply unit (100) of this type. The high-voltage supply unit (100) has at least one high-voltage cable (101) for feeding a high voltage, and comprising at least one measuring device (105) for measuring the high voltage, wherein the measuring device (105) has at least one first capacitor (108), and wherein the first capacitor is formed by at least one first section (108) of the high-voltage cable (101).
Bibliography:Application Number: EP20120172133