Monitoring of substrate temperature

• Main Authors: RYZHIKOV, DMITRIY, MULLIN, RICHARD S, KUZMICHEV, ANATOLY, BELOUSOV, IGOR V, PANKOV, OLEG G, KONONENKO, YURIY G
• Format: Patent
• Language: English; French; German
• Published: 26.09.2012
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

An apparatus for depositing a coating on one or more parts (21) has: a chamber (22); a part holder (64) for carrying the part(s); a bias voltage source (94) coupled to the part(s) to apply a bias voltage to the part(s); a source (34) of the coating material; a plurality of temperature sensors (76); and a plurality of leads (90) passing outputs of the temperature sensors (76) out from the chamber (22). A temperature monitoring system (150) has a temperature data processor (300). At least one fiber optic link (223) couples the temperature data processor (300) to the temperature sensors (76) so as to electrically isolate the temperature data processor (300) from the bias voltage.