METHOD FOR PRODUCING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP

A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: th...

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Bibliographic Details
Main Authors MAUBERT, SANDRINE, FOUILLET, YVES, BALERAS, FRANÇOIS, COCHET, MARTINE
Format Patent
LanguageEnglish
French
German
Published 31.08.2016
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NON-POSITIVE DISPLACEMENT PUMPS
PERFORMING OPERATIONS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
TRANSPORTING
WEAPONS
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Summary:A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: the cavity is produced in the first substrate; then the first and second substrates are assembled together; then the deformable membrane is produced in the second substrate.
Bibliography:Application Number: EP20100781481