Post cathode physical vapor deposition system and magnet array for use within a post cathode

A magnet array (200) for a steered arc physical vapor deposition system has multiple magnets (230) sandwiched between two pole plates (210, 220).

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Bibliographic Details
Main Authors Beers, Russell A, Tryon, Brian S
Format Patent
LanguageEnglish
French
German
Published 04.12.2019
Subjects
BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Summary:A magnet array (200) for a steered arc physical vapor deposition system has multiple magnets (230) sandwiched between two pole plates (210, 220).
Bibliography:Application Number: EP20120153682