DEVICE FOR EMITTING VACUUM ULTRAVIOLET LIGHT

• Main Authors: ISHIZU, SUMITO, KAWAGUCHI, NORIAKI, YANAGIDA, TAKAYUKI, NAGAMI, TOMOHITO, ONO, SHINGO, SUYAMA, TOSHIHISA, YOSHIKAWA, AKIRA, FUKUDA, KENTARO, YOKOTA, YUI
• Format: Patent
• Language: English; French; German
• Published: 18.07.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

[Problems to be Solved] The present invention aims to provide a novel light emitting device for ultraviolet light, in particular for vacuum ultraviolet light, which has rectified the drawbacks of the ultraviolet light emitting apparatus in current use, namely, the problems that the apparatus is large in size, consumes high power, is short in life, and has unstable strength. [Means to Solve the Problems] A vacuum ultraviolet light emitting device comprising: a luminescence substrate which is composed of a transparent substrate of lithium fluoride, magnesium fluoride, calcium fluoride, barium fluoride or the like, and a metal fluoride thin-film layer formed on the transparent substrate and being a thin-film layer of a metal fluoride such as LuLiF 4 , LaF 3 , BaF 2 or CaF 2 , the metal fluoride being doped with atoms of neodymium (Nd), thulium (Tm), erbium (Er) or the like; and an electron beam source such as a thermionic emission gun or a field emission gun, wherein the luminescence substrate and the electron beam source are disposed in a vacuum atmosphere, and the metal fluoride thin-film layer is irradiated with electron beams from the electron beam source to emit light including wavelength components of vacuum ultraviolet light.