Probe apparatus

In a probe apparatus, a charged-particle optical system 1 irradiates a sample 4 with a charged particle beam 3, and a detector 10 detects secondary particles or reflected particles emitted or reflected by the sample 4. A probe 7 is brought into mechanical contact with the sample surface, and the coo...

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Bibliographic Details
Main Authors SEKIHARA, ISAMU, KOIKE, HIDEMI, TOMIMATSU, SATOSHI, HAMAMURA, YUICHI, SUGIMOTO, ARITOSHI, AZUMA, JUNZO, ISHITANI, TOHRU, SHIMASE, AKIRA
Format Patent
LanguageEnglish
French
German
Published 29.02.2012
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
SEMICONDUCTOR DEVICES
TESTING
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Summary:In a probe apparatus, a charged-particle optical system 1 irradiates a sample 4 with a charged particle beam 3, and a detector 10 detects secondary particles or reflected particles emitted or reflected by the sample 4. A probe 7 is brought into mechanical contact with the sample surface, and the coordinates of the tip of the probe 7 at this position are recorded in advance. The drive speed and drive distance of the probe 7 are controlled based on the recorded coordinates and the coordinates of the position of the probe after contact with the sample 4.
Bibliography:Application Number: EP20110008933