DEVICE OF PRODUCING WAFER LENS AND METHOD OF PRODUCING WAFER LENS

A device for producing a wafer lens, including: a stage which supports a glass substrate; an XY-axis moving mechanism which moves the stage on an XY-plane; an XY air slide guide mechanism which floats the stage relative to an XY guide by means of air, and guides the movement of the stage; a molding...

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Bibliographic Details
Main Authors FUJII YUITI, IMAI TOSHIYUKI, SARUYA NOBUHIRO
Format Patent
LanguageEnglish
French
German
Published 12.03.2014
Subjects
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Summary:A device for producing a wafer lens, including: a stage which supports a glass substrate; an XY-axis moving mechanism which moves the stage on an XY-plane; an XY air slide guide mechanism which floats the stage relative to an XY guide by means of air, and guides the movement of the stage; a molding die to be filled with resin; a Z-axis moving mechanism which elevates or lowers the molding die; a Z air slide guide mechanism which floats the molding die relative to a Z guide by means of air, and guides the elevation and lowering of the molding die; and a control device which locks a moving position of the stage by controlling an activation and a deactivation of the XY air slide guide mechanism, and also locks a moving position of the molding die by controlling an activation or a deactivation of the Z air slide guide mechanism.
Bibliography:Application Number: EP20090839269