Measurement and endpointing of sample thickness

• Main Authors: MORIARTY, MICHAEL, PETERSON, BRENNAN, SCHAMPERS, RUUD, YOUNG, RICHARD
• Format: Patent
• Language: English; French; German
• Published: 21.09.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM sam...