SCANNING PROBE MICROSCOPE WITH CURRENT CONTROLLED ACTUATOR

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Bibliographic Details
Main Author RYCHEN, JOERG
Format Patent
LanguageEnglish
French
German
Published 31.10.2012
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Bibliography:Application Number: EP20080874917