Thin film manufacturing method and thin film element

A thin film manufacturing method includes the steps of a) placing a substrate (120) including a first main surface inside a reaction container (110) filled with a raw material solution (112), and b) forming a thin film (130) by irradiating a light in the direction of the first main surface of the su...

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Bibliographic Details
Main Authors OHTA, EIICHI, YAGI, MASAHIRO
Format Patent
LanguageEnglish
French
German
Published 05.12.2012
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Summary:A thin film manufacturing method includes the steps of a) placing a substrate (120) including a first main surface inside a reaction container (110) filled with a raw material solution (112), and b) forming a thin film (130) by irradiating a light in the direction of the first main surface of the substrate (120).
Bibliography:Application Number: EP20100252008