Parallel cantilever deflection measurement

The present invention discloses a micromechanical measurement system comprising: - a laser source (1), for emitting a coherent light beam (2), - an interferometer, - a camera (10), for acquiring a picture of the interferogram composed of a plurality of fringes, - image processing means. The image pr...

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Bibliographic Details
Main Authors MEISTER, ANDRE, GRUENER, GABRIEL, POLESEL-MARIS, JEROME
Format Patent
LanguageEnglish
French
German
Published 22.06.2011
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:The present invention discloses a micromechanical measurement system comprising: - a laser source (1), for emitting a coherent light beam (2), - an interferometer, - a camera (10), for acquiring a picture of the interferogram composed of a plurality of fringes, - image processing means. The image processing means are arranged in order to compute the absolute deflection ”z x of the movable area at a position x along the length of the flexible micromechanical structure by performing one initialization in a first interferogram picture taken at a fixed time to and at least one measurement in a second interferogram picture taken at a variable time t.
Bibliography:Application Number: EP20090180213