CAPACITIVE HUMIDITY SENSOR WITH NANOPOROUS HYDROPHILIC DIELECTRIC AND FABRICATION PROCESS THEREFOR

A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one seco...

Full description

Saved in:
Bibliographic Details
Main Authors JOUSSEAUME, VINCENT, DANEL, JEAN-SEBASTIEN, DESLOGES, BRIGITTE, GRANGE, HUBERT
Format Patent
LanguageEnglish
French
German
Published 06.04.2011
Subjects
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
MEASURING
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TESTING
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.
Bibliography:Application Number: EP20090797450