CAPACITIVE HUMIDITY SENSOR WITH NANOPOROUS HYDROPHILIC DIELECTRIC AND FABRICATION PROCESS THEREFOR
A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one seco...
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Main Authors | , , , |
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Format | Patent |
Language | English French German |
Published |
06.04.2011
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Subjects | |
Online Access | Get full text |
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Summary: | A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor. |
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Bibliography: | Application Number: EP20090797450 |