High flow rate transportable UHP gas supply system

• Main Authors: LUSIGNEA, MARK A, GERSHTEIN, VLADIMIR YLIY, MCMAHON, KEVIN J, GREENAWALD, BRUCE HERMAN, DE ALMEIDA BOTELHO, ALEXANDRE, FORD, ROBERT WILLIAM
• Format: Patent
• Language: English; French; German
• Published: 30.03.2011
• Subjects: BLASTING; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; HEATING; LIGHTING; MECHANICAL ENGINEERING; STORING OF DISTRIBUTING GASES OR LIQUIDS; VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES; WEAPONS

A high flow rate, transportable, ultra high purity gas vaporization and supply system, comprising: (a) a vessel (20; 20') suitable for carrying large quantities of a liquefied gas; (b) a plurality of valves adapted to operate with liquid or gas phases; (c) a loading/unloading unit (30; 30') disposed on said vessel (20; 20'), preferably at the top of the vessel, for loading and unloading the liquefied gas, the loading/unloading unit preferably including said plurality of valves; (d) at least one heater (50; 50') containing one or more heating elements (54; 54') permanently positioned on the vessel (20; 20') to supply energy into the liquefied gas, said heater (50; 50') adapted to cause said liquefied gas to be supplied through said loading/unloading unit (30; 30') as a gas; and (e) a heater controller (60; 60') adapted to use process variables feedback for regulating said one or more heating elements (54; 54') maintaining and regulating gas output.