Method to vary dimensions of a substrate during nano-scale manufacturing
A method for varying dimensions of a substrate supported by a chuck, said substrate having an edge facing bodies of an actuator assembly, each of said bodies being coupled to a lever arm, said bodies defining an area there between, said method comprising: positioning the substrate within said area d...
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Main Authors | , , , , |
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Format | Patent |
Language | English French German |
Published |
29.12.2010
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Subjects | |
Online Access | Get full text |
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Summary: | A method for varying dimensions of a substrate supported by a chuck, said substrate having an edge facing bodies of an actuator assembly, each of said bodies being coupled to a lever arm, said bodies defining an area there between, said method comprising: positioning the substrate within said area defined by said bodies, applying compressive forces to said substrate with said actuator assembly, imparting an angular movement to the lever arm about a pivot axis, the lever arm undergoing rotational movement causing body to undergo translational movement toward the substrate in a direction extending transversely to pivot axis. |
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Bibliography: | Application Number: EP20100182998 |